Samsung has begun mass producing 14nm DRAM using EUV technology. Following the company’s shipment of its  first EUV DRAM in March of last year, Samsung has increased the number of EUV layers to five to deliver today’s  DDR5 devices. As DRAM continues to scale down the 10nm-range, EUV technology becomes increasingly important to improve patterning ...

This story continues at Samsung increases EUV layers to five on DDR5

Or just read more coverage at Electronics Weekly