Imec has built a high-speed UV-sensitive time-delay-integration (TDI) imager that is based on CCD-in-CMOS technology. The TDI imager has a quantum efficiency of more than 70% in the near-UV region, making it an appropriate tool for industrial machine vision, in particular inspection in semiconductor manufacturing processes. The specialty imager broadens imec’s CCD-in-CMOS-based TDI imager portfolio, that ...

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